8/31/2010	5:38:56 PM	Program exited cleanly
8/31/2010	5:41:38 PM	Program started normally
8/31/2010	5:41:38 PM	Helium valve closed
8/31/2010	5:41:38 PM	H2 valve closed
8/31/2010	5:41:38 PM	BCl3 valve closed
8/31/2010	5:41:38 PM	PH3 valve closed
8/31/2010	5:41:38 PM	SiCl4 pre valve closed
8/31/2010	5:41:38 PM	SiCl4 post valve closed
8/31/2010	5:41:38 PM	Main Vac valve closed
8/31/2010	5:41:38 PM	Bypass valve closed
8/31/2010	5:41:38 PM	Bubbler valve closed
8/31/2010	5:41:39 PM	Helium MFC set to  0.000000
8/31/2010	5:41:39 PM	H2 MFC set to  0.000000
8/31/2010	5:41:39 PM	BCl3 MFC set to  0.000000
8/31/2010	5:41:39 PM	PHl3 MFC set to  0.000000
8/31/2010	5:41:39 PM	SiCl4 MFC set to  0.000000
8/31/2010	5:41:39 PM	Bypass solenoid MFC set to  760.000000
8/31/2010	5:41:39 PM	Tube furnace set to 0
8/31/2010	5:41:43 PM	Main Vac valve opened
8/31/2010	5:41:45 PM	Bypass valve opened
